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JIS K 0164:2010 (R2015)
New product
JIS K 0164:2010 (R2015)
Surface chemical analysis - Secondary-ion mass spectrometry - Method for depth profiling of boron in siliconMore info
| Author | JSA |
|---|---|
| Editor | JSA |
| Document type | Standard |
| Format | File |
| Confirmation date | 2015-10-20 |
| ICS | 71.040.40 : Chemical analysis
|
| Number of pages | 12 |
| Cross references | ISO 17560 (2002-07), MOD |
| Year | 2010 |
| Document history | |
| Country | Japan |
| Keyword | JIS 0164;0164 |