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BS IEC 62047-36:2019

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BS IEC 62047-36:2019

Semiconductor devices. Micro-electromechanical devices - Environmental and dielectric withstand test methods for MEMS piezoelectric thin films

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Author BSI
Editor BSI
Document type Standard
Format File
EAN ISBN 978 0 580 99118 9
ICS 31.080.99 : Other semiconductor devices
31.140 : Piezoelectric devices
Number of pages 20
Cross references IEC 62047-36:2019
Year 2019
Country United Kingdom