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BS IEC 63068-1:2019

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BS IEC 63068-1:2019

Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Classification of defects

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Author BSI
Editor BSI
Document type Standard
Format File
EAN ISBN 978 0 580 96413 8
ICS 31.080.99 : Other semiconductor devices
Number of pages 26
Cross references IEC 63068-1:2019
Year 2019
Country United Kingdom